Pressure measurement equipment in semiconductor manufacturing processes <Air conditioning system>
High-sensitivity measurement from an extremely low differential pressure range (10 Pa)! A sensor that achieves high pressure resistance across the entire range of 50 kPa.
We would like to introduce examples of the application of pressure measurement devices in the air conditioning systems of semiconductor manufacturing processes. Silicon capacitance sensors are available that can measure with high sensitivity from a micro differential pressure range (10 Pa) and achieve a high pressure resistance of 50 kPa across the entire range. We have started supporting IO-Link for micro differential pressure measurement, adapting to the evolution of air conditioning systems. 【Pressure Measurement Field of Air Conditioning Systems】 ■ Dry Air ■ N2 Gas ■ Exhaust Gas *For more details, please refer to the related links or feel free to contact us.
- Company：長野計器
- Price：Other
![[Use Case] Pressure Measurement Equipment in Semiconductor Manufacturing Process <Gas Supply System>](https://image.www.ipros.com/public/product/image/413/2001011924/IPROS43208655797897401611.png?w=280&h=280)
